Glow discharge decomposition of hydrocarbon gases. Through measurem(?) ats of the high frequency C-V characteristics of Al/ a-C: H/ Si MIS structure, the electronic properties of a-C: H/ Si interface are discussed. 利用直流辉光放电分解碳氢气体来淀积a-C:H(氢化非晶碳)膜,通过测量Al/a-C:H/SiMIS结构的高频C-V曲线讨论了a-C:H/Si界面的电子特性。
They are fully consistent with glow discharge characteristics under low pressure. 这些特性与低气压下的辉光放电完全吻合。
It is found that the Townsend mode turns into the glow mode when the external voltage increases over a certain critical value. With the increase of the external voltage, the transition characteristics of discharge current density and gas voltage in both Townsend and glow discharges are obtained. 研究还发现了提高外加电压幅值,汤森放电阶段、辉光放电阶段以及模式转化时,放电电流与气体电压变化特征。
Describe the basic process of gas discharge, the basic nature and characteristics of discharged plasma gas, glow discharge characteristics and some parameters of the calculation. 3. 2概述气体放电的基本过程、气体放电等离子体的基本性质和辉光放电特性及一些参数的计算。
Some experimental studies and analysis were carried out on the glow discharge characteristics of the developed equipment, and the prevention and control measures were proposed subsequently. 对研制设备的低压放电特性进行了试验研究和分析,并针对性提出低压放电防控措施。